Thermal spray (SiAl) APT powder technology will advance rotatable sputter target coatings

Rotatable magnetron sputter deposition has become the most widely used coating technology for large area deposition. Silicon is typically used for coating glass in applications such as anti-reflection coatings, all-dialectric mirrors, beam dividers, band pass filters, and polarizers. Thin film SiO2 and Si2N4 are sputtered from SiAl coated targets that are made from HAI's APT Silicon Aluminum powder.